HP Series Palladium Hydrogen

HP Series palladium hydrogen purifiers have been the #1 worldwide solution for pure hydrogen for over 30 years. The HP Series product line operates on the principle of selective diffusion of hydrogen through palladium membranes. Since the membrane allows only H₂ molecules to pass through to the outlet side, this technology provides the purest hydrogen for use in sensitive semiconductor and analytical applications. Compound semiconductor MOCVD processes, crystal growth and photovoltaic deposition processes are the most common uses for our hydrogen purifiers.

Regenerable catalyst, getter and resin purifiers are not as effective because they cannot remove some impurities when the inlet level is > 1 ppm. These other technologies are also limited by finite lifetimes and hazardous shipping restrictions. Most importantly, reactive chemistries do not provide a method for in-situ verification of performance.

With palladium membrane hydrogen purifiers, all impurities can be removed in a single process. Incoming levels at 100 ppm or more are completely stopped so that only hydrogen diffuses through to the pure outlet side. Palladium technology has a theoretical unlimited lifetime since the technology does not rely on consumable media. The impurities are stopped and released through the bleed gas vent line. To periodically check the purity performance, just perform a simple helium leak test to verify that the membranes are at specification.  Helium molecules are larger than H₂ molecules, so they cannot diffuse across the palladium membrane.  Expensive analytical instruments and time-consuming drydown procedures are not required to verify the purity performance of pallladium purifiers.

Choose the HP Series for flows < 71 slpm, and the HP Series V-Purge for flows from 72 to 220 slpm.

For information on replacement palladium cells or OEM Pd cells for use in Emcore, Veeco Aixtron or Thomas Swan MOCVD tools, see the information at the bottom of this page.

Learn more about Palladium Membrane Purifier Technology in our Library

HP Series Hydrogen Purifiers – 1-71 slpm

The compact HP Series hydrogen purifier uses a reliable design with over 30 years of proven success. The complete unit includes the palladium cell, stable temperature control, bleed gas flowmeter and manual outlet valve.

The palladium purifier can be mounted in a rack or on a suitable benchtop.

Key Features:

• “Outside-In” diffusion
  
• Overtemperature protection
  
• Outlet impurities: < 1 ppb O₂, H₂O, CO, CO₂, N₂, THC, inerts
  
• Inlet gas purity: minimum 99.99%
  
• Pressure rating: 250 psig

¹ 200 psig inlet pressure and 0 psig outlet pressure

Data Sheet: HP-Series 2-150
Flow Curves: HP-2 | HP-10 | HP-25 | HP-50 | HP-100 | HP-150
Dimensional Drawings: HP-2, 10, 25 & 50 | HP-100, 150
Technical Articles:

• White Paper - Comparison of Palladium vs. Catalytic Purifiers
• White Paper - Comparison of Outside-in vs. Inside-out Pd tube design

HP Series V-Purge Hydrogen Purifiers – 72-220 slpm

The V-Purge system enhances the performance of our HP Series purifiers for higher flow rates typical in production fabs. The patented system provides improved performance to handle flow changes, superior protection from power failures and pressure surges and fast switching from nitrogen purge to full hydrogen flow.  Expect over 5 years of continuous service with this robust system for demanding processes.

Key Features:

• Outlet impurities: < 1 ppb O₂, H₂O, CO, CO₂, N₂, THC, inerts
  
• Inlet gas purity: minimum 99.99%
  
• “Outside-In” diffusion
  
• Separate controls & purifier enclosures with connecting cable
  
• RS 485 Network capability-modbus slave
  
• CE compliant, purifier enclosure is ATEX compliant

¹Flow is @ 200 psig inlet pressure and 0 psig outlet pressure
Purifier enclosure: 30" (762mm)H x 20" (508mm)W x 13.25" (337mm)D, 110 Ibs (50 kg)
Control module: 5.25" (134mm)H x 17" (432mm)W x 13" (330mm)D, 15.Slbs (7 kg)

HP Series V-Purge diagram with complete system and interconnecting cables

Data Sheet: HP-Series V-Purge
Flow Curves: HP-200 | HP-230 | HP-400 | HP-480
Dimensional Drawings: Controls Enclosure | Purifier Enclosure
Technical Articles:

• White Paper - Benefits of V-Purge System
• White Paper - Comparison of Palladium vs. Catalytic Purifiers
• White Paper - Comparison of Outside-in vs. Inside-out Pd tube design

Replacement and OEM Palladium Cells

Palladium alloy diffusion cells can be used as replacements in Johnson Matthey HP Series units or other palladium alloy diffusion units coupled with a control system. Cells are available for every size corresponding to our HP Series model numbers. Each cell includes the heaters and thermocouples.

For replacement of palladium cells in Aixtron, Thomas Swan, Emcore, Veeco or other OEM MOCVD tools, be sure to provide serial number and other information to assure compatibility.

HP-100C Palladium Cell used in OEM MOCVD reactor or HP-100 Purifier	HP-400 Palladium Cell used in OEM MOCVD reactor

Data Sheet: Replacement HP Series Cells
Dimensional Drawings: HP-2 | HP-10 | HP-25 | HP-50 | HP-100 | HP-150 | HP-200-230 | HP-400-480