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 The PSH Series palladium hydrogen purifiers offer a cost-effective,
single system solution for hydrogen flows up to 60 Nm³/hr. Multiple
purifiers can be installed in parallel flow to provide 100% redundancy
or additional flow capacity.
These palladium-membrane based purifiers use multiple columns in
parallel flow to provide a modular solution for higher flows. All PSH
purifiers include the patented V-Purge system to ensure quick startup
and rapid removal of hydrogen during alarm conditions. System
electronics are housed in a separate, purged enclosure in accordance
with hydrogen safety standards.
PSH Series purifiers operate on the principle of selective diffusion
of hydrogen through palladium membranes. Since the membrane allows only
H2 molecules to pass through to the outlet side, this technology provides the purest hydrogen for ultra-high purity processes.
Competitive purifiers such as the MegaTorr PS7 zirconium getter or
Aeronex H Series regenerable catalytic are not as effective because
they cannot remove some impurities. MegaTorr PS7 purifiers cannot remove ppm levels of N2, CH4, CO and CO2. These zirconium getter purifiers are too costly for use on compressed
hydrogen due to the short lifetimes and cost of frequent getter column
replacements. Aeronex H Series purifiers do not remove N2 and CH4, and these regenerable-type purifiers are prone to premature breakthrough caused by impurity spikes in the supply gas. Also, neither technology can provide a method for in-situ verification of performance.
With palladium membrane purifiers, all impurities can be removed.
Incoming levels at 100 ppm or more are completely stopped so that only
hydrogen diffuses through to the pure outlet side. Palladium technology
has a theoretical unlimited lifetime since the palladium is not
adsorbing impurities. To periodically check the purity performance,
just perform a simple helium leak test to verify that the membranes are
at specification. The modular design allows easy isolation of the
specific areas to be leak tested.
Typical applications include bulk gas supply for silicon and compound semiconductor facilities, and LCD manufacturing.
Key Features
- Palladium membrane technology
- < 1 ppb O2, H2O, CO, CO2, N2, THC, inerts
- Accepts inlet gas 99.99% or better
- Deoxo catalyst pre-purifier protects against oxygen impurity spikes
- Automatic nitrogen purge during power loss or alarm utilizing patented V-Purge system
- Compact single cabinet design for installation in Class I Division II environment
- PLC with touch screen HMI
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