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 For semiconductor facilities with multiple process tools, gas purifiers are usually installed at the main source near the gas plants and tanks. This method of distributing purified gas throughout the facility offers lower costs versus the use of single purifiers at each point-of-use. Bulk purification strategies also provide better uptime because 100% redundancy can be provided through the use of dual purifiers in parallel flow. With this configuration, purified gas will be supplied via the primary or secondary purifier to assure uninteruppted supply in the event of maintenance or downtime of the primary purifier.
JM offers bulk gas purifiers for hydrogen, nitrogen, argon, helium and oxygen. Refer to the Product Pages or Wizard for suggested purifiers for your gas and flow rate.
Typical Gases: All bulk gases
Flow Rates: 225-1,000 slpm for all bulk gases
Suggested Purifiers:
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